Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage
- 11 January 2017
- journal article
- research article
- Published by Springer Science and Business Media LLC in Microsystem Technologies
- Vol. 23 (12), 5317-5327
- https://doi.org/10.1007/s00542-016-3264-x
Abstract
No abstract availableKeywords
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