Simulation of annular dark field stem images using a modified multislice method

Abstract
The multislice method of image simulation has been extensively applied to conventional transmission electron micrographs (CTEM), but not yet to scanning transmission electron micrographs (STEM). In this paper the multislice method is adapted for application to the STEM and several examples relevant to the VG-HB501 STEM are presented. Annular dark field images of a (111) crystal silicon substrate supporting a single heavy atom are calculated.