Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process
- 1 February 2004
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 110 (1-3), 206-212
- https://doi.org/10.1016/j.sna.2003.10.056
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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