Guided-wave optics in silicon-on-insulator technology
- 1 October 1996
- journal article
- Published by Institution of Engineering and Technology (IET) in IEE Proceedings - Optoelectronics
- Vol. 143 (5), 307-311
- https://doi.org/10.1049/ip-opt:19960675
Abstract
Silicon-on-insulator (SOI) technology offers tremendous potential for the integration of optoelectronic functions on a silicon substrate. The authors have demonstrated integrated 3 dB optical directional couplers, a 5 × 9 star coupler, and a Mach–Zehnder wavelength demultiplexer using SOI rib waveguides. These devices show excellent performance characteristics and represent key components for the realisation of monolithic optoelectronic circuits in a silicon IC - compatible technology.Keywords
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