Surface-micromachined components for articulated microrobots
- 1 March 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 5 (1), 10-17
- https://doi.org/10.1109/84.485210
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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