Replication technology for optical microsystems
- 15 July 2004
- journal article
- Published by Elsevier BV in Optics and Lasers in Engineering
- Vol. 43 (3-5), 373-386
- https://doi.org/10.1016/j.optlaseng.2004.02.007
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Applications and fabrication of subwavelength gratingsPublished by Optica Publishing Group ,2002
- On-chip replication of micro-optical structures for VCSEL to fiber couplingPublished by SPIE-Intl Soc Optical Eng ,2001
- ORMOCER®s for Optical Interconnection TechnologyJournal of Sol-Gel Science and Technology, 2001
- Synthesis, properties and applications of inorganic–organic copolymers (ORMOCER®s)Current Opinion in Solid State and Materials Science, 1999