The program VEPFIT is presented which extrats the relevant parameters from positron measurements on implanted materials and layered structures. Measurements of the Doppler Broadening parameter S and the positronium fraction F vs the energy of the incident positrons are analyzed by means of a semi‐linear fitting procedure. The principles of the analysis method are given and the performance of the program on artificially and experimentally obtained data is demonstrated. Fitting strategies are outlined and the accuracy of the fitting results is discussed.