Snapping microswitches with adjustable acceleration threshold
- 30 June 1996
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 54 (1-3), 579-583
- https://doi.org/10.1016/s0924-4247(97)80018-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Mechanical properties of thin filmsMetallurgical Transactions A, 1989
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988
- A technique for the determination of stress in thin filmsJournal of Vacuum Science & Technology B, 1983
- Local Stress Measurement in Thin Thermal SiO2 Films on Si SubstratesJournal of Applied Physics, 1972
- Microminiature ganged threshold accelerometers compatible with integrated circuit technologyIEEE Transactions on Electron Devices, 1972