Development and characterization of micro-mechanical gratings for optical modulation
- 23 December 2002
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of Ninth International Workshop on Micro Electromechanical Systems
Abstract
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This publication has 1 reference indexed in Scilit:
- Thermal microactuators for surface-micromachining processesPublished by SPIE-Intl Soc Optical Eng ,1995