Ion Flux Characteristics in Pulsed Dual Magnetron Discharges Used for Deposition of Photoactive TiO2 Films
- 23 February 2011
- journal article
- research article
- Published by Wiley in Plasma Processes and Polymers
- Vol. 8 (3), 191-199
- https://doi.org/10.1002/ppap.201000131
Abstract
No abstract availableKeywords
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