Morphology and structure of TiO2 thin films grown by atomic layer deposition
- 1 March 1995
- journal article
- Published by Elsevier BV in Journal of Crystal Growth
- Vol. 148 (3), 268-275
- https://doi.org/10.1016/0022-0248(94)00874-4
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- Effect of Heating Probe on Reactively Sputtered TiO2 Film GrowthJapanese Journal of Applied Physics, 1993
- TiO2 thick-film gas sensors and their suitability for NOx monitoringSensors and Actuators B: Chemical, 1993
- Titanium isopropoxide as a precursor in atomic layer epitaxy of titanium dioxide thin filmsChemistry of Materials, 1993
- Platinum-titania oxygen sensors and their sensing mechanismsSensors and Actuators B: Chemical, 1993
- Development of a needle-type glucose sensor based on a titanium dioxide oxygen electrode for the artificial pancreasSensors and Actuators B: Chemical, 1993
- Mechanism of hydrogen sensing by Pd/TiO2 Schottky diodesSensors and Actuators B: Chemical, 1993
- An IR and NMR study of the chemisorption of titanium tetrachloride on silicaThe Journal of Physical Chemistry, 1993
- Photocatalytic properties of titanium dioxide (TiO2)Chemistry of Materials, 1993
- Trimethylamine-sensing mechanism of TiO2-based sensors 1. Effects of metal additives on trimethylamine-sensing properties of TiO2 sensorsSensors and Actuators B: Chemical, 1993
- IR study of gas-sensor materials: NO interaction on ZnO and TiO2, pure or modified by metalsSensors and Actuators B: Chemical, 1992