Sprayed and Spin-Coated Multilayer Antireflection Coating Films for Nonvacuum Processed Crystalline Silicon Solar Cells

Abstract

Using the simple and cost-effective methods, spin-coated ZrO₂-polymer composite/spray-deposited TiO₂-compact multilayer antireflection coating film was introduced. With a single TiO₂-compact film on the surface of a crystalline silicon wafer, 5.3% average reflectance (the reflectance average between the wavelengths of 300 nm and 1100 nm) was observed. Reflectance decreased further down to 3.3% after forming spin-coated ZrO₂on the spray-deposited TiO₂-compact film. Silicon solar cells were fabricated using CZ-Si p-type wafers in three sets: (1) without antireflection coating (ARC) layer, (2) with TiO₂-compact ARC film, and (3) with ZrO₂-polymer composite/TiO₂-compact multilayer ARC film. Conversion efficiency of the cells improved by a factor of 0.8% (from 15.19% to 15.88%) owing to the multilayer ARC.Jscwas improved further by 2 mA cm⁻²(from 35.3 mA cm⁻²to 37.2 mA cm⁻²) when compared with a single TiO₂-compact ARC.