Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM)
- 20 January 2007
- conference paper
- Published by SPIE-Intl Soc Optical Eng in MOEMS-MEMS 2007 Micro and Nanofabrication
- Vol. 6463, 64630
- https://doi.org/10.1117/12.699837