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Negative ions in a CCl2F2 radio frequency discharge
Home
Publications
Negative ions in a CCl2F2 radio frequency discharge
Negative ions in a CCl2F2 radio frequency discharge
ES
E. Stoffels
E. Stoffels
WS
W. W. Stoffels
W. W. Stoffels
DV
D. Vender
D. Vender
GK
G. M. W. Kroesen
G. M. W. Kroesen
FH
F. J. de Hoog
F. J. de Hoog
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1 July 1995
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 13
(4)
,
2051-2057
https://doi.org/10.1116/1.579651
Abstract
No abstract available
Cited by 21 articles