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Etching of GaN Using Phosphoric Acid
Home
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Etching of GaN Using Phosphoric Acid
Etching of GaN Using Phosphoric Acid
AS
Akira Shintani
Akira Shintani
SM
Shigekazu Minagawa
Shigekazu Minagawa
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1 May 1976
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 123
(5)
,
706-713
https://doi.org/10.1149/1.2132914
Abstract
No abstract available
Cited by 43 articles