Piezoelectric materials parameters for piezoelectric thin films in GHz applications
- 1 February 2009
- journal article
- research article
- Published by Cambridge University Press (CUP) in International Journal of Microwave and Wireless Technologies
- Vol. 1 (1), 19-27
- https://doi.org/10.1017/s1759078709000038
Abstract
Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, materials and properties for thin-film bulk acoustic wave resonators are discussed on some selected issues: the piezoelectric coefficients and acoustic losses of AlN, the relation of the first one with microstructural parameters, the inclusion of parasitic elements, and the merits of and problems with ferroelectric materials.Keywords
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