A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics
- 1 January 2010
- journal article
- review article
- Published by Acoustical Society of Japan in Acoustical Science and Technology
- Vol. 31 (2), 115-123
- https://doi.org/10.1250/ast.31.115
Abstract
No abstract availableKeywords
This publication has 41 references indexed in Scilit:
- Magnetic Induction Micromachine—Part II: Fabrication and TestingJournal of Microelectromechanical Systems, 2006
- Magnetic Induction Machines Integrated Into Bulk-Micromachined SiliconJournal of Microelectromechanical Systems, 2006
- Magnetic Induction Micromachine—Part I: Design and AnalysisJournal of Microelectromechanical Systems, 2006
- A High-Power MEMS Electric Induction MotorJournal of Microelectromechanical Systems, 2004
- Magnetically levitated micro PM motors by two types of active magnetic bearingsIEEE/ASME Transactions on Mechatronics, 2001
- Control tribological and mechanical properties of MEMS surfaces. Part 1: critical reviewMicrosystem Technologies, 1999
- A planar variable reluctance magnetic micromotor with fully integrated stator and coilsJournal of Microelectromechanical Systems, 1993
- Microactuators for microrobots: a critical surveyJournal of Micromechanics and Microengineering, 1992
- The case for magnetically driven microactuatorsSensors and Actuators A: Physical, 1992
- Surface micromachined mechanisms and micromotorsJournal of Micromechanics and Microengineering, 1991