Very low surface recombination velocity on p-type c-Si by high-rate plasma-deposited aluminum oxide
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- 12 October 2009
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 95 (15), 151502
- https://doi.org/10.1063/1.3250157
Abstract
Aluminum oxide layers can provide excellent passivation for lowly and highly doped p-type silicon surfaces. Fixed negative charges induce an accumulation layer at the p-type silicon interface, resulting in very effective field-effect passivation. This paper presents highly negatively charged (Qox=−2.1×1012 cm−2) aluminum oxide layers produced using an inline plasma-enhanced chemical vapor deposition system, leading to very low effective recombination velocities (∼10 cm s−1) on low-resistivity p-type substrates. A minimum static deposition rate (100 nm min−1) at least one order of magnitude higher than atomic layer deposition was achieved on a large carrier surfaces (∼1 m2) without significantly reducing the resultant passivation quality.Keywords
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