New Technique of the X-Ray Efficiency Measurement of a Charge-Coupled Device with a Subpixel Resolution
- 1 May 1997
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 36 (5R)
- https://doi.org/10.1143/jjap.36.2906
Abstract
We report the use of a new technique to measure the X-ray detection efficiency of a charge-coupled device (CCD) with subpixel resolution. The new technique makes use of a parallel X-ray beam and metal mesh placed just in front of the CCD. The CCD camera we used is a conventional system using the TC213 (Texas Instrument Japan (TIJ)) whose pixel size is 12 µ m ×12 µ m with one million pixels. The mesh has 4 µm diameter holes spaced at 12 µm intervals. We produced an efficiency map within a typical pixel showing the gate structure in detail: a virtual gate, a clock gate and an antiblooming gate. The gate structure we measured is consistent with the manufacturer's design value. By selecting single pixel events, we detected a pixel boundary. Additional plans for application will also be discussed.Keywords
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