Nanoindentation and FEM study of the effect of internal stress on micro/nano mechanical property of thin CNx films
- 1 December 2000
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 377-378, 138-147
- https://doi.org/10.1016/s0040-6090(00)01314-6
Abstract
No abstract availableKeywords
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