Ultra-thin Cr2O3 well-crystallized films for high transmittance APSM in ArF line
- 30 June 2003
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 67-68, 17-23
- https://doi.org/10.1016/s0167-9317(03)00179-5
Abstract
No abstract availableKeywords
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