Development of Capacitive Ultrasonic Sensor with Parylene Diaphragm Using Micromachining Technique
- 1 July 2007
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 46 (7S), 4595-4601
- https://doi.org/10.1143/jjap.46.4595
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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