Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films
- 15 January 2011
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 257 (7), 3069-3074
- https://doi.org/10.1016/j.apsusc.2010.10.118
Abstract
No abstract availableKeywords
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