9.5: Microfabrication of a 220 GHz grating for sheet beam amplifiers
- 1 May 2010
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A 50 watt CW 220 GHz sheet beam amplifier is under development at NRL. We report on microfabrication techniques used to construct a grating-based amplifier circuit using Ultraviolet Lithography (UV-LIGA) and Deep Reactive Ion etching (DRIE).Keywords
This publication has 3 references indexed in Scilit:
- High heat flux thermal management of microfabricated upper millimeter-wave vacuum electronic devicesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2008
- Removal of SU-8 photoresist for thick film applicationsMicroelectronic Engineering, 2002
- Wave dispersion and growth analysis of low-voltage grating Čerenkov amplifiersPhysics of Plasmas, 1994