High efficiency selectively oxidised MBE grown vertical-cavity surface-emitting lasers

Abstract
The authors have used conventional solid source MBE with Be p-type doping and single layer selective oxidation to produce 20 µm diameter VCSELs (λ = 980 nm) with 47% wallplug efficiency at 10 mW output power and over 40 mW maximum output power in a configuration without heatsinking.