Angular selective transmittance through electrochromic tungsten oxide films made by oblique angle sputtering

Abstract

Tungsten oxide films were made by magnetron sputtering with a large angle between the substrate normal and the direction of the deposition flux. Scanning electron microscopy displayed a microstructure composed of inclined columns. Spectrophotometric measurements on films with different amounts of electrochemically intercalated Li⁺ ions showed pronounced angular selective transmittance together with electrochromism.