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Process control of organosilicon plasmas for barrier film preparations
Home
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Process control of organosilicon plasmas for barrier film preparations
Process control of organosilicon plasmas for barrier film preparations
RL
R. Lamendola
R. Lamendola
RD
R. D’agostino
R. D’agostino
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30 June 1998
journal article
Published by
Walter de Gruyter GmbH
in
Pure and Applied Chemistry
Vol. 70
(6)
,
1203-1208
https://doi.org/10.1351/pac199870061203
Abstract
Article Process control of organosilicon plasmas for barrier film preparations was published on June 30, 1998 in the journal Pure and Applied Chemistry (volume 70, issue 6).
Keywords
PUBLISHED
ORGANOSILICON PLASMAS
PLASMAS FOR BARRIER
CONTROL OF ORGANOSILICON
PROCESS CONTROL
ARTICLE PROCESS
JOURNAL PURE
PREPARATIONS ARTICLE
All Articles
Open Access
Cited by 38 articles