Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies
- 19 January 2005
- journal article
- Published by Elsevier BV in Sensors and Actuators B: Chemical
- Vol. 108 (1-2), 986-992
- https://doi.org/10.1016/j.snb.2004.12.029
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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