A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes
- 1 July 2007
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in American Control Conference (ACC)
- No. 07431619,p. 3488-3502
- https://doi.org/10.1109/acc.2007.4282300
Abstract
The atomic force microscope (AFM) is one of the most versatile tools in nanotechnology. For control engineers this instrument is particularly interesting, since its ability to image the surface of a sample is entirely dependent upon the use of a feedback loop. This paper will present a tutorial on the control of AFMs. We take the reader on a walk around the control loop and discuss each of the individual technology components. The major imaging modes are described from a controls perspective and recent advances geared at increasing the performance of these microscopes are highlighted.Keywords
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