Performance of the advanced MEVVA® IV 80-10 metal ion implantation system
- 15 April 1992
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 51 (1-3), 546-550
- https://doi.org/10.1016/0257-8972(92)90296-m
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Current industrial practices — technical note: High throughput metal-ion implantation systemSurface and Coatings Technology, 1990
- High dose metal ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Metal vapor vacuum arc ion sourceReview of Scientific Instruments, 1986
- High current ion sourceApplied Physics Letters, 1985