Effects of mean free path on the preferentially orientated growth of AlN thin films
- 1 October 2005
- journal article
- Published by Elsevier BV in Journal of Crystal Growth
- Vol. 283 (3-4), 315-319
- https://doi.org/10.1016/j.jcrysgro.2005.06.007
Abstract
No abstract availableKeywords
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