Nanometer-scale mapping of the strain and Ge content of Ge/Si quantum dots using enhanced Raman scattering by the tip of an atomic force microscope
- 10 February 2011
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 83 (8), 081302
- https://doi.org/10.1103/physrevb.83.081302
Abstract
Tip-enhanced Raman spectra of as-grown self-assembled Ge/Si quantum dots have been obtained with nanoscale spatial resolution. It is found that Ge-Ge and Si-Ge modes in the Raman spectra are significantly enhanced only when the atomic force microscope tip with a gold nanoparticle is positioned on the dots. It is also found that the Si substrate peak at 520 cm is shifted considerably in the neighborhood of the dots. This implies that a large stress acts on the Si substrate around the dots. The Ge content reduces at the center of the dots. This result suggests that the dots consist of a Si-rich core and a Ge-rich shell. The Ge content decreases and the strain in the Si substrate increases with an increase in the dot height.
Keywords
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