Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure
- 1 July 1983
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 105 (4), 367-384
- https://doi.org/10.1016/0040-6090(83)90319-x
Abstract
No abstract availableThis publication has 38 references indexed in Scilit:
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