Scheduling of time-constrained single-arm cluster tools with purge operations in wafer fabrications
- 1 January 2023
- journal article
- research article
- Published by Elsevier BV in Journal of Systems Architecture
Abstract
No abstract availableKeywords
Funding Information
- Natural Science Foundation of Jiangsu Province (BK20190448)
- National Natural Science Foundation of China (61773206, 61902185, 72161019)
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