Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS
- 16 May 2007
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 136 (2), 638-645
- https://doi.org/10.1016/j.sna.2006.12.003
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Aluminum Nitride Contour-Mode Vibrating RF MEMSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2006
- A review of thin-film resonator technologyIEEE Microwave Magazine, 2003
- PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)Electronics Letters, 1999