Three-Dimensional Metallic Microstructures Fabricated by Soft Lithography and Microelectrodeposition
- 14 January 1999
- journal article
- research article
- Published by American Chemical Society (ACS) in Langmuir
- Vol. 15 (3), 826-836
- https://doi.org/10.1021/la980857y
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- SU-8: a low-cost negative resist for MEMSJournal of Micromechanics and Microengineering, 1997
- Constructing single- and multiple-helical microcoils and characterizing their performance as components of microinductors and microelectromagnetsJournal of Microelectromechanical Systems, 1997
- Fabrication and characterization of a concentric cylindrical microtransformerIEEE Transactions on Magnetics, 1997
- Microcontact printing and electroplating on curved substrates: Production of free‐standing three‐dimensional metallic microstructuresAdvanced Materials, 1997
- X-ray lathe: An X-ray lithographic exposure tool for nonplanar objectsJournal of Microelectromechanical Systems, 1996
- Rapid prototyping of complex structures with feature sizes larger than 20 μmAdvanced Materials, 1996
- LIGA and related technologies for industrial applicationSensors and Actuators A: Physical, 1996
- Microcoils fabricated by UV depth lithography and galvanoplatingSensors and Actuators A: Physical, 1996
- Three-dimensional microfabrication by localized electrochemical depositionJournal of Microelectromechanical Systems, 1996
- Microfabrication by microcontact printing of self‐assembled monolayersAdvanced Materials, 1994