Thin tantalum and tantalum oxide films grown by pulsed laser deposition
- 15 December 2000
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 168 (1-4), 234-238
- https://doi.org/10.1016/s0169-4332(00)00605-x
Abstract
No abstract availableKeywords
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