Diamond and Amorphous Carbon MEMS
- 1 April 2001
- journal article
- Published by Springer Science and Business Media LLC in MRS Bulletin
- Vol. 26 (4), 309-311
- https://doi.org/10.1557/mrs2001.68
Abstract
The designer of microelectromechanical systems (MEMS) can increase MEMS performance either by improved mechanical design or by the selection of a MEMS material with improved mechanical performance. In the quest to identify highperformance MEMS materials, diamond and amorphous carbon have recently emerged as a promising class of materials.Keywords
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