SrTiO₃ and (Ba,Sr)TiO₃ Thin Films Preparation by Ion Beam Sputtering and Their Dielectric Properties

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1 January 1991

journal article
Published by Springer Science and Business Media LLC in MRS Proceedings

Vol. 243
https://doi.org/10.1557/proc-243-297

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Reactive Coevaporation Synthesis and Characterization of SrTiO₃ Thin Films
Japanese Journal of Applied Physics, 1991
SrTiO₃ Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties
Japanese Journal of Applied Physics, 1991

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