Solid-liquid equilibria calculations for LPE of AlvGa1−u−vInuAs on InP
- 1 August 1978
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 49 (8), 4577-4579
- https://doi.org/10.1063/1.325473
Abstract
Detailed phase diagram calculations are presented for the quaternary Al v Ga1−u−v In u As alloys that are lattice matched to InP, and the experimental possibilities of growing AlGaInAs layers on InP by liquid‐phaseepitaxy are discussed. The calculations indicate that there is a very large distribution coefficient for Al which will make LPE of AlGaInAs difficult.Keywords
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