Progress in integrated gyroscopes
- 20 July 2004
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviationIEEE Journal of Solid-State Circuits, 2002
- MEMS inertial rate and acceleration sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Performance of MEMS inertial sensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Post-CMOS processing for high-aspect-ratio integrated silicon microstructuresJournal of Microelectromechanical Systems, 2002