Low-Cost Flow Transducer Fabricated with the Amanda-Process
- 1 January 2001
- book chapter
- conference paper
- Published by Springer Science and Business Media LLC
- p. 1444-1447
- https://doi.org/10.1007/978-3-642-59497-7_341
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- AMANDA—surface micromachining, molding, and diaphragm transferSensors and Actuators A: Physical, 1999
- Microvalves with bistable buckled polymer diaphragmsJournal of Micromechanics and Microengineering, 1996
- A microvalve system fabricated by thermoplastic moldingJournal of Micromechanics and Microengineering, 1995