Abstract
With their significant advantages over traditional electromagnetic motors, ultrasonic motors (USMs) are becoming attractive for mechatronic applications. Since USMs suffer from a lack of applicable mathematical model while their speed characteristics are heavily nonlinear and time varying, it used to be difficult to apply them for servo application. This paper presents a fuzzy neural network controller for servo position control of an USM. It combines both the knowledge-based fuzzy logic and the learning-incorporated neural network. As a result, it compensates the nonlinear behavior of the motor and optimizes its performance on-line. To further improve the motor performance, both of their control inputs, namely the driving frequency and phase difference of the 2-phase inverter waveforms, are employed. Experiments are then performed for various reference inputs. The results demonstrate superiority of the controller in terms of tracking and steady-state performance.