Design and fabrication of a thermal infrared emitter
- 15 July 1996
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 55 (1), 57-63
- https://doi.org/10.1016/s0924-4247(96)01250-2
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Post buckling of micromachined beamsJournal of Micromechanics and Microengineering, 1994
- Electrical and optical characteristics of vacuum-sealed polysilicon microlampsIEEE Transactions on Electron Devices, 1992
- Surface micromachined pressure transducersSensors and Actuators A: Physical, 1991
- Investigations on free-standing polysilicon beams in view of their application as transducersSensors and Actuators A: Physical, 1990
- Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon filmsJournal of Applied Physics, 1988