Corona discharge processes

Abstract

Applications of corona discharge induced plasmas and unipolar ions are reviewed. Corona process applications emphasize one of two aspects of the discharge: the ions produced or the energetic electrons producing the plasma. The ion identities depend on the polarity of the discharge and the characteristics of the gas mixture, specifically on the electron attaching species. The electron energies depend on the gas characteristics and on the method of generating the corona. In general, in an application using ions, the corona induced plasma zone will occupy a small fraction of the total process volume, while a process using the electrons will fill most of the volume with the plasma. Current state-of-the knowledge of ionized environments and the function of corona discharge processes are discussed in detail.