Measurement of piezoelectric coefficients of ferroelectric thin films
- 1 August 1994
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 76 (3), 1764-1767
- https://doi.org/10.1063/1.357693
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- High quality lead zirconate titanate films grown by organometallic chemical vapour depositionIntegrated Ferroelectrics, 1993
- Phase transitions and domain structure in heteroepitaxial ferroelectric (Ba1−xSrx)TiO3//(100)MgO and PbTiO3//(100)MgO thin filmsFerroelectrics, 1993
- Design considerations of a piezoelectric-on-silicon microrobotSensors and Actuators A: Physical, 1992
- Processing and electrical properties of Pb (ZrxTi1−x)O3 (x=0.2–0.75) films: Comparison of metallo-organic decomposition and sol-gel processesJournal of Applied Physics, 1992
- Piezoelectric micromotors for microrobotsJournal of Microelectromechanical Systems, 1992
- Measurement of piezoelectric constants using an optical heterodyne interferometerElectronics Letters, 1992
- Microtransport induced by ultrasonic Lamb wavesApplied Physics Letters, 1991
- A planar process for microfabrication of a scanning tunneling microscopeSensors and Actuators A: Physical, 1990
- Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric propertiesJournal of Applied Physics, 1989
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988