Repetitively pulsed, high-concentration implantation
- 1 July 1991
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 61 (1), 48-51
- https://doi.org/10.1016/0168-583x(91)95559-v
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Dislocation structure in near-surface layers of pure metals formed by ion implantationMaterials Science and Engineering: A, 1989
- Advances in metal ion sourcesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Simultaneous ion implantation and depositionNuclear Instruments and Methods, 1981
- Limits of composition achievable by ion implantationJournal of Vacuum Science and Technology, 1978