Concept of a high-resolution miniature spectrometer using an integrated filter array

Abstract

A high-resolution miniature spectrometer has been demonstrated by utilizing a 128-channel integrated filter array, fabricated by using the combinatorial deposition technique, as a dispersive component whose passbands range from $722.0\text{to}880.0\mathrm{nm}$ with a bandwidth (or spectral resolution) from $1.7\text{to}3.8\mathrm{nm}$ and an average channel interval of $1.2\mathrm{nm}$. The miniature spectrometer is smaller than $1{\mathrm{cm}}^3$ without any moving parts. This kind of miniature spectrometer has the advantages of very low payload, high resolution, and high reliability simultaneously, which are especially urgently needed for space applications.