Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe
- 1 December 2002
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 102 (1-2), 106-113
- https://doi.org/10.1016/s0924-4247(02)00339-4
Abstract
No abstract availableKeywords
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