Growth mechanism and characterization of chemical oxide films produced in peroxide mixtures on Si(100) surfaces
- 1 April 2005
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 476 (1), 51-58
- https://doi.org/10.1016/j.tsf.2004.09.008
Abstract
No abstract availableKeywords
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